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METinfo-Fachbeiträge • Articles dans METinfo • METinfo Articles • Articoli nel METinfo
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2011
F. Meli and A. Küng
Realization of a large sample 3D metrology AFM with differential Jamin interferometers
Proceedings of the 11th Int. Conf. of the European Soc. for Precision Engineering and Nanotechnology (euspen), May 2011, Lake Como, Italy, Vol. 1, pp.203-206, 2011
2010
E. Hack, E. Patterson, T. Siebert, and R. Thalmann
Calibration and validation of full-field techniques
Proceedings 14th International Conference on Experimental Mechanics (ICEM14), Poitiers, France, 2010
R. Thalmann
Die Passung ist nur so genau wie die Lehre
SWISS ENGINEERING STZ, Oktober 2010
F. Meli and A. Küng
Numerical µ-CMM simulation for the application of Monte-Carlo methods for the uncertainty estimation of measured dimensional parameters
Proceedings of the 10th Int. Conf. of the European Soc. for Precision Engineering and Nanotechnology (euspen), Delft, Netherlands, Vol. 1, pp 91-94, 2010
2009
A. Küng, F. Meli
Areal surface texture calibration by enhanced micro-CMM
Proceedings of the 9th Int. Conf. of the European Soc. for Precision Engineering and Nanotechnology (euspen), June 2009, San Sebastian, Spain, Vol. 2, p.311-314.
R. Thalmann
Straightness and parallelism
Handbook of Optical Metrology, Principles and Applications, Toru Yoshizawa ed., CRC Press 2009
2008
A. Küng, F. Meli
Versatile probes for the METAS 3D Micro-CMM
10th Int. Conf. of the European Soc. for Precision Engineering and Nanotechnology (euspen), May 2008, Zürich, Proceedings Vol. 2, pp. 338-342.
F. Meli
Design of a new 3D-metrology AFM at METAS using differential Jamin type interferometers
NanoScale 2008: 8th Seminar on Quantitative Microscopy (QM) and 4th Seminar on Nanoscale Calibration Standards and Methods, INRIM, Turin, Italy
R. Thalmann
Dimensional Metrology
BIPM Metrology Summer School, 29 June - 11 July 2008, Sèvres, France
2007
A. Küng
Comparison of three independent calibration methods applied to an ultra-precision µ-CMM
7th Int. Conf. of the European Soc. for Precision Engineering and Nanotechnology (EUSPEN), May 2007, Bremen (Proceedings, Vol. 1, pp. 230–233)
A. Küng, F. Meli, R. Thalmann
Ultra precision micro-CMM using a low force 3D touch probe
Meas. Sci. and Technol., 18, pp. 319–327, 2007
F. Meli, A. Küng
AFM investigation on possible surface damages caused by mechanical probing with small ruby spheres
Meas. Sci. and Technol., 18, N2, pp. 496–502, 2007
A. Küng, F. Meli, R. Thalmann
Ultra precision micro-CMM using a low force 3D touch probe
Measurement Science and Technology, Vol. 18, No. 2, pp. 319–327, 2007
F. Meli, A. Küng
AFM investigation on possible surface damages caused by mechanical probing with small ruby spheres
Measurement Science and Technology, Vol. 18, No. 2, pp. 496–502, 2007
2006
R. Thalmann
Basics of highest accuracy roundness measurement
Memorias Simposio de Metrologia, Querétaro Mexico, 2006
R. Thalmann, F. Meli, A. Küng
Taktile Mikrokoordinatenmesstechnik an den Grenzen
VDI-Berichte 1950, Messtechnik für Mikro- und Nano-Engineering, S. 67–76, 2006
2005
L. Koenders, F. Meli
Height and pitch at nanoscale – how traceable is nanometrology?
Nanoscale Calibration Standards and Methods", G. Wilkening and L. Koenders (Eds), Wiley-VCH Verlag, Weinheim, ISBN 3-527-40502-X, pp. 205-219, 2005.
F. Meli
Lateral and vertical diameter measurements on polymer particles with a metrology AFM
Nanoscale Calibration Standards and Methods, G. Wilkening and L. Koenders (Eds), Wiley-VCH Verlag, Weinheim, ISBN 3-527-40502-X, pp. 361-374, 2005
A. Küng, F. Meli
Self calibration method for 3D roundness of spheres using an ultra-precision coordinate measuring machine
Proceedings of the 5th Int. Conf. of the European Soc. for Precision Engineering and Nanotechnology (euspen), May 2005, Montpellier, France, pp. 193-196
F. Meli, A. Küng, R. Thalmann
Ultra precision micro-CMM using a low force 3D touch probe
Recent Developments in Traceable Dimensional Measurements III, Proceedings SPIE, Vol. 5879, pp. 240-247, 2005
R. Thalmann, J. Spiller
A primary roundness measuring machine
Recent Developments in Traceable Dimensional Measurements III, Proceedings SPIE, Vol. 5879, pp. 123-132, 2005
R. Thalmann
Einflussgrössen bei der Kalibrierung von Längenmessmitteln
Techn. Messen 72/5, S. 286-294, 2005
2004
F. Meli, A. Küng
Performance of a low force 3D touch probe on an ultraprecision CMM for small parts
Euspen 4 th Int. Conference on Precision Engineering and Nanotechnology, Proc., pp. 270-271, 2004
2002
F. Meli
Roughness measurements according to existing standards with a metrology AFM profiler
Proceedings of the 3rd Int. Euspen Conference, F. L. M. Delbressine et al. (Eds.), May 2002, Eindhoven, The Netherlands, 2, pp. 533-536, 2002
F. Meli
Application of a metrology AFM profiler for various dimensional measurands
Fine mechanics and optics journal, 2002, Czech Republic, in press
2001
R. Thalmann
Vorstoss in neue Dimensionen
Schweizer Maschinenmarkt, . 31, S. 135-140, 2001
2000
F. Meli
Particle diameter calibration by means of a metrology AFM
Proceedings of the 1st EUSPEN Topical Conference on Fabrication and Metrology in Nanotechnology, L. De Chiffre and K. Carneiro (Editors), DK-Copenhagen, vol. 1, pp. 45-51, 2000
F. Meli
Critical dimension (CD) measurements using a metrology AFM profiler
Proceedings of the 4th Seminar on Quantitative Microscopy, K. Hasche, W. Mirandé, G. Wilkening (Editors), PTB-Bericht PTB-F-39, S. 58- 65, 2000
R. Thalmann
EUROMET key comparison: cylindrical diameter standards
Metrologia, 37, pp, 253-260, 2000
1998
B. Vaucher, R. Thalmann
CCDM comparison of gauge block measurements
Metrologia 35, 97, 1998
R. Thalmann
The network of international comparisons in gauge block metrology
Proc. SPIE 3477, 1998
W. Hou, R. Thalmann
Thermal expansion measurement of gauge blocks
Proc. SPIE 3477, 1998
F. Meli, R. Thalmann
Z-calibration of a metrology AFM scanner using an interferometer and a tilting device together with a linear displacement stage
Proc. of the 3rd seminar on quantitative microscopy, K. Hasche et al. (Eds.), Braunschweig, PTB-Bericht,PTB-F-34, 61, 1998
F. Meli, R. Thalmann
Long-range AFM profiler used for accurate pitch measurements
Measurements Science and Technology 9(7),1087, 1998
1997
F. Meli, R. Thalmann
Pitch measurements of calibration grids using a metrology AFM and a linear displacement stage
Proc. of the 2nd seminar on quantitative microscopy, K. Hasche et al. (Eds.), Braunschweig, PTB-Bericht, PTB-F-30, 177, 1997
R. Thalmann
A new high precision length measuring machine, Progress in Precision Engineering and Nanotechnology
H. Kunzmann et al. (Eds.), Braunschweig, V1, 112, 1997
F. Meli
Long range scans with an atomIc force microscope, Progress in Precision Engineering and Nanotechnology
H. Kunzmann et al. (Eds.), Braunschweig, V2, 437, 1997
R. Thalmann
A new high precision length measuring machine, Proceedings 8ème Congrès international de métrologie
Besançon, France, 1997
1996
R. Thalmann
Thermal expansion measurement of gauge blocks (international comparison)
Metrologia 33, 187, 1996
H. Haitjema, H. Bosse, R. Thalmann, A. Sacconi
International comparison of roundness profiles with nanometric accuracy
Metrologia 33, 67, 1996
R. Thalmann
Intercomparison of parallelism measurements
Measurement 17, 17, 1996
1995
B. G. Vaucher, R. Thalmann, H. Baechler
European comparison of short gauge block measurement by interferometry
Metrologia 32, 79, 1995
1994
W. Hou, R. Thalmann
Accurate measurements of the refractive index of air
Measurement 13, 307, 1994